MEMS Tiltmeter


The MEMS tiltmeter is a compact, waterproof tiltmeter with a range of ±10° from vertical. It is used to monitor changes in the inclination of a structure. Applications for the tiltmeter include:

  • Monitoring rotation of retaining walls, piers, and piles.
  • Providing early warning of potential structural damage.
  • Documenting any effects of nearby deep excavations.
MEMS Tiltmeter


The MEMS tiltmeter measures tilt over a range of ±10° from vertical and is available in uniaxial and biaxial versions. Signal conditioning makes the tiltmeter compatible with most data loggers.

The tiltmeter is fixed to the structure via an angle bracket that can be welded to steel or bolted to an anchor set into concrete or rock. Because the tiltmeter has a relatively wide range, careful zeroing of the sensor is not required.

Readings are obtained with a data logger or a portable readout. The initial reading is used as a baseline. Changes in the inclination of the structure are found by comparing current readings to the initial.


Mounts Anywhere: The tiltmeter is supplied with a bracket that can be welded to steel or bolted to anchors.

Wide Range: The tiltmeter has a range of ±10°, so it can be installed without careful zeroing.

Uniaxial or Biaxial: The tiltmeter is available in uniaxial and biaxial versions.

Waterproof: The tiltmeter can tolerate submersion.

Suitable for Automatic Readings: The tiltmeter outputs a voltage signal that can be read by most data loggers. It can also be read manually with the EL/MEMS Data Recorder.

For more information

Please download the datasheet and manual for the MEMS Tiltmeter. These documents can be viewed and printed with Adobe Acrobat Reader.

MEMS Tiltmeter Specifications

MEMS Tiltmeter ±10°, Uniaxial57803101
MEMS Tiltmeter ±10°, Biaxial57803102
MEMS Tiltmeter ±20°, Uniaxial57803201
MEMS Deepwater Tiltmeter, ±10°, Uniaxial57803301
MEMS Deepwater Tiltmeter, ±10°, Biaxial57803302
Tiltmeter includes angle bracket, 5 m of signal cable, calibration record, an user manual. Anchor is not included. Please note that the Deepwater Tiltmeter does not include an angle bracket
Sensor TypeMEMS (Micro Electro-Mechanical Systems) sensor for tilt readings and a 3K ohm thermistor for temperature readings
Range±10 degrees or ±20 degrees
Resolution9 arc seconds, using a 13 bit readout device such as the CR1000 datalogger
Repeatability±22 arc seconds
Calibration11-point calibration taken at three temperatures from -8 to 40 °C
Input Power8 to 15 Vdc
Output Signal±2.5 Vdc
BodyStainless steel. Waterproof to 20m
Dimensions32 x 190 mm (1.25 x 7.5"). Mounting stud is M8
Signal Cable50613527Cable has seven 22-gauge tinned-copper conductors, shield, and polyurethane jacket. The standard product includes 5 m of cable. Custom lengths of cable can be special ordered
Angle Bracketincluded with std tiltmeterThe angle bracket included with the tiltmeter is suitable for most applications. It can be welded to steel or bolted to an anchor. The bracket does not include an anchor
Embedment Mounting Bracket97803115This special-order bracket provides a way to stand the tiltmeter on sloping surfaces, such as the concrete face of a rock-fill dam. The bracket is grouted into a drill hole
Epoxy Grout Kit57803133Includes plastic dispenser and cartridge of quick-set epoxy grout. Sufficient for 15 anchors
Anchors are used in concrete or rock. Order one anchor per tiltmeter.
Expansion Anchor57803128Includes anchor, bolt, and washer. Install in 9.5 x 64 mm (3/8 x 2.5") drill hole.
Groutable Anchor with Bolt57803130Includes anchor, bolt, and washer. Install in 13 x 90mm ( 0.5 x 3.5") drill hole. Requires epoxy grout be
EL/MEMS Data Recorder56813500The EL/MEMS Data Recorder is a portable readout that displays and stores tilt readings in volts and temperature readings in degrees C. Includes software for transferring stored readings to a Windows PC
Terminal Box for 12 Sensors57711600Terminal box allows connection of up to 12 tiltmeters. Sensors are selected by a rotary switch. Fiberglass box measures 290 x 345 x 135mm (11.5 x 13.5 x 5.25")
Jumper Cable56813557Jumper cable is required to connect the Data Recorder to the terminal box
M-Logger58810100The M-Logger, shown above, is a simple data logger dedicated to MEMS sensors. It reads one tiltmeter connected directly or up to 16 sensors connected via a multiplexer. See separate datashee
Campbell Scientific LoggersThe Campbell Scientific CR1000 data logger allows direct connection of two biaxial sensors or three uniaxial sensors. Adding a multiplexer increases the capacity to 16 uniaxial or biaxial sensors. Up to five multiplexers can be added to the CR1000 data logger